Splet31. avg. 2024 · While CMP tools traditionally have had a cleaner attached, SiC wafers are typically 6 inches in diameter, and 6-inch tools don’t always have a cleaner attached. This is because they were primarily created for non-compound semiconductor wafers, which may not have as stringent cleaning requirements.
Protection and control IED manager PCM600 - ABB Group
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PVA Roller Brushes Post-CMP Cleaning and Tribological …
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